Our vision system provides high-precision inspection for semiconductor wafers, including notch angle measurement for accurate alignment and surface defect detection such as scratches, particles, non-coating and wafer discolorisation
The system integrates high-resolution imaging with intelligent algorithms (AI-enabled) to deliver real-time analysis and data output, ensuring process reliability and yield improvement.
Inspection data can be seamlessly transmitted to host systems via SECS/GEM or OPC UA for full factory integration.
Our solution provides real-time monitoring for semiconductor diffusion and wet process tanks, ensuring process stability and product integrity.
The system detects wafer breakage, chipping, or abnormal fragments within chemical baths using advanced sensing and vision technologies. Early detection prevents contamination, equipment damage, and yield loss.
Integrated with intelligent algorithms, the system enables instant alerts and automated response, while inspection data can be transmitted to host systems via SECS/GEM or OPC UA for full factory traceability.